Design and fabrication of PDMS‐based electrostatically actuated MEMS cantilever beam
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Micro & Nano Letters
سال: 2020
ISSN: 1750-0443,1750-0443
DOI: 10.1049/mnl.2019.0728